Scanning Capacitance Microscopy on Semiconductor Materials |
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| Journal | Solid State Phenomena (Volumes 78 - 79) |
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| Volume | Beam Injection Assessment of Microstructures in Semiconductors |
| Edited by | H. Tomokage and T. Sekiguchi |
| Pages | 425-0 |
| DOI | 10.4028/www.scientific.net/SSP.78-79.425 |
| Citation | Vito Raineri et al., 2001, Solid State Phenomena, 78-79, 425 |
| Authors | Vito Raineri, Filippo Giannazzo |
| Keywords | Carrier Profiling, Scanning Capacitance Microscopy, Two-Dimensional Characterisation |
| Full Paper | 
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