Beam Injection Studies of Dislocations and Oxygen Precipitates in Semiconductor Silicon |
| Journal |
Solid State Phenomena (Volumes 78 - 79) |
| Volume |
Beam Injection Assessment of Microstructures in Semiconductors |
| Edited by |
H. Tomokage and T. Sekiguchi |
| Pages |
57-64 |
| DOI |
10.4028/www.scientific.net/SSP.78-79.57 |
| Authors |
Sergio Pizzini,
Simona Binetti,
Alessia Le Donne,
E. Leoni,
Maurizio Acciarri,
Giancarlo Salviati,
L. Lazzarini
|
| Keywords |
Cathodoluminescence, Dislocation, Oxygen Precipitates, Photoluminescence, Silicon |
| Full Paper |
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