Beam Injection Studies of Dislocations and Oxygen Precipitates in Semiconductor Silicon |
| Journal |
Solid State Phenomena (Volumes 78 - 79) |
| Volume |
Beam Injection Assessment of Microstructures in Semiconductors |
| Edited by |
H. Tomokage and T. Sekiguchi |
| Pages |
57-64 |
| DOI |
10.4028/www.scientific.net/SSP.78-79.57 |
| Citation |
Sergio Pizzini et al., 2001, Solid State Phenomena, 78-79, 57 |
| Authors |
Sergio Pizzini, Simona Binetti, Alessia Le Donne, E. Leoni, Maurizio Acciarri, Giancarlo Salviati, L. Lazzarini |
| Keywords |
Cathodoluminescence, Dislocations, Oxygen Precipitates, Silicon |
| Full Paper |
Get the full paper by clicking here
|
