Simulation of EBIC Contrast for Extended Defects Inclined to the Surface |
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| Journal | Solid State Phenomena (Volumes 78 - 79) |
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| Volume | Beam Injection Assessment of Microstructures in Semiconductors |
| Edited by | H. Tomokage and T. Sekiguchi |
| Pages | 73-78 |
| DOI | 10.4028/www.scientific.net/SSP.78-79.73 |
| Citation | V.V. Sirotkin et al., 2001, Solid State Phenomena, 78-79, 73 |
| Authors | V.V. Sirotkin, Eugene B. Yakimov |
| Keywords | Computer Simulation, Diffusion Length, Electron Beam Induced Current (EBIC), Semiconductor |
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