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Reconstruction of Diffusion Length Distribution by the Modulated EBIC and OBIC

Journal Solid State Phenomena (Volumes 78 - 79)
Volume Beam Injection Assessment of Microstructures in Semiconductors
Edited by H. Tomokage and T. Sekiguchi
Pages 79-88
DOI 10.4028/www.scientific.net/SSP.78-79.79
Citation Eugene B. Yakimov, 2001, Solid State Phenomena, 78-79, 79
Authors Eugene B. Yakimov
Keywords Depletion Region, Diffusion Length, Electron Beam Induced Current (EBIC), Modulation, Semiconductor
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