Beam Injection Assessment of Microstructures in Semiconductors
Solid State Phenomena Volumes 78 - 79
doi:10.4028/www.scientific.net/SSP.78-79
-
p341
Dose Rate Dependence of Ion-Induced-Damage in Si Evaluated by Spectroscopic Ellipsometry
[
135 K
]
Authors: Y. Murakami, H. Yamauchi, Taizoh Sadoh, A. Kenjo, Masanobu Miyao
-
p345
Influence of Ion Beam Irradiation on Solid-Phase Regrowth of Amorphous Si on SiO2
[
142 K
]
Authors: I. Tsunoda, T. Nagata, Taizoh Sadoh, A. Kenjo, Masanobu Miyao
-
p349
Formation of Silicon Nanoclusters in Silicon Oxide Using an Electron Beam
[
303 K
]
Authors: M.V. Zamoryanskaya, V.I. Sokolov, Alla A. Sitnikova
-
p357
Assessment of Radiation Induced Lattice Defects in Shallow Trench Isolation Diodes Irradiated by Neutron
[
294 K
]
Authors: K. Kobayashi, H. Ohyama, K. Hayama, Y. Takami, Eddy Simoen, A. Poyai, C. Claeys, A. Mohammadzadeh, S. Kohiki
-
p367
Deep Levels in Bulk-ZnSe Grown by Bridgman Method
[
303 K
]
Authors: M. Yoneta, T. Kubo, K. Ohmori, K. Yoshino, M. Ohishi, H. Saito
-
p377
Characterization of Defects in 6H-Type Epitaxially Grown Silicon Carbide Wafer by Cathodoluminescence Microscopy
[
235 K
]
Authors: Toshiyuki Isshiki, Hiroshi Saijo, Shigehiro Nishino, M. Shiojiri
-
p381
The Relaxation of the ZnO Single Crystals (000-1) Surface
[
300 K
]
Authors: Hideyuki Maki, Noboru Ichinose, Naoki Ohashi, Hajime Haneda, Junzo Tanaka
-
p387
TEM Observation of Barium Titanate Thin Films Consisting of Nano-Sized Single Crystals Prepared by Sol-Gel Processing
[
268 K
]
Authors: Y. Yamashita, N. Kurata, Makoto Kuwabara
-
p395
The Investigation of Charge Transport Properties of SOI Semiconductor Devices Using a Heavy Ion Microbeam
[
284 K
]
Authors: Toshio Hirao, Jamie Steward Laird, H. Mori, S. Onoda, Hisayoshi Itoh
-
p401
A System for Ultra-Fast Transient Ion and Pulsed Laser Current Microscopies as a Function of Temperature
[
379 K
]
Authors: Jamie Steward Laird, Toshio Hirao, S. Onoda, H. Mori, Hisayoshi Itoh
-
p407
Visualization of Electron Beam Charge Storage and Thermal Release in Thin Insulating Layers
[
215 K
]
Authors: Hans Joachim Fitting, Th. Hingst, E. Schreiber
-
p413
Development of an Ultra-Precision Positioner and its Applications
[
286 K
]
Authors: Yoshiya Egashira, Kouji Kosaka, Shinji Takada, Tetsuya Iwabuchi, Misawo Shibata, Keiichi Nagamoto, Hiroshi Kubota
-
p419
Photoabsorption Spectroscopy on Nanometer Scale by Scanning Tunneling Microscopy
[
407 K
]
Authors: A. Hida, Y. Mera, Koji Maeda
-
p425
Scanning Capacitance Microscopy on Semiconductor Materials
[
599 K
]
Authors: Vito Raineri, Filippo Giannazzo