Hydrogen Diffusion through Deformed Si-Si Bonds at Grain Boundaries in Hot-Wire CVD Polycrystalline Silicon Films |
| Journal |
Solid State Phenomena (Volumes 80 - 81) |
| Volume |
Polycrystalline Semiconductors VI |
| Edited by |
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner |
| Pages |
109-114 |
| DOI |
10.4028/www.scientific.net/SSP.80-81.109 |
| Citation |
Jatindra K. Rath et al., 2001, Solid State Phenomena, 80-81, 109 |
| Authors |
Jatindra K. Rath, Ruud E.I. Schropp, W. Beyer |
| Keywords |
Hot-Wire CVD, Hydrogen Diffusion, Polycrystalline Silicon, Secondary Ion Mass Spectroscopy (SIMS) |
| Full Paper |
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