Paper Title:
Hydrogen Penetration into Si under Wet Chemical Etching: Experiment and Simulation
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 80-81)
Edited by
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner
Pages
121-126
DOI
10.4028/www.scientific.net/SSP.80-81.121
Citation
O. V. Feklisova, E. B. Yakimov, N. Yarykin, "Hydrogen Penetration into Si under Wet Chemical Etching: Experiment and Simulation", Solid State Phenomena, Vols. 80-81, pp. 121-126, 2001
Online since
November 2001
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Price
$32.00
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