Paper Title:
Influence of Thermal Treatments on the Crystallisation of LPCVD-Deposited Si Thin Films
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 80-81)
Edited by
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner
Pages
199-204
DOI
10.4028/www.scientific.net/SSP.80-81.199
Citation
A. Bachrouri, A. Romano-Rodríguez, J.L. Alay, A. Vilà, J.R. Morante, H. Kotb, R. Rogel, Y. Helen, T. Mohammed-Brahim, M. Sarret, O. Bonnaud, "Influence of Thermal Treatments on the Crystallisation of LPCVD-Deposited Si Thin Films", Solid State Phenomena, Vols. 80-81, pp. 199-204, 2001
Online since
November 2001
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