Paper Title:
Porous Silicon in Microsystems: Thermal Isolation Applications
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 80-81)
Edited by
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner
Pages
417-428
DOI
10.4028/www.scientific.net/SSP.80-81.417
Citation
S. Périchon, V. Lysenko, B. Remaki, D. Barbier, "Porous Silicon in Microsystems: Thermal Isolation Applications", Solid State Phenomena, Vols. 80-81, pp. 417-428, 2001
Online since
November 2001
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Price
$32.00
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