Paper Title:
Thin-Film Microelectromechanical Devices on Large-Area Substrates
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 80-81)
Edited by
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner
Pages
429-440
DOI
10.4028/www.scientific.net/SSP.80-81.429
Citation
V. Chu, J. P. Conde, M. Boucinha, J. Gaspar, P. Brogueira, "Thin-Film Microelectromechanical Devices on Large-Area Substrates", Solid State Phenomena, Vols. 80-81, pp. 429-440, 2001
Online since
November 2001
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Price
$32.00
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