Effects of Ion Bombardment upon Microcrystalline Silicon Growth |
| Journal |
Solid State Phenomena (Volumes 80 - 81) |
| Volume |
Polycrystalline Semiconductors VI |
| Edited by |
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner |
| Pages |
71-76 |
| DOI |
10.4028/www.scientific.net/SSP.80-81.71 |
| Citation |
Billel Kalache et al., 2001, Solid State Phenomena, 80-81, 71 |
| Authors |
Billel Kalache, R. Brenot, V. Tripathi, Satyendra Kumar, R. Vanderhaghen, Pere Roca i Cabarrocas |
| Keywords |
Growth Mechanisms, Ion Bombardment, Microcrystalline Silicon, Plasma Deposition, Spectroscopic Ellipsometry (SE) |
| Full Paper |
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