Paper Title:
Effects of Ion Bombardment upon Microcrystalline Silicon Growth
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 80-81)
Edited by
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner
Pages
71-76
DOI
10.4028/www.scientific.net/SSP.80-81.71
Citation
B. Kalache, R. Brenot, V. Tripathi, S. Kumar, R. Vanderhaghen, P. Roca i Cabarrocas, "Effects of Ion Bombardment upon Microcrystalline Silicon Growth", Solid State Phenomena, Vols. 80-81, pp. 71-76, 2001
Online since
November 2001
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Price
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