Nucleation and Growth of Hydrogenated Microcrystalline Silicon Films: New Insights from Scanning Probe Microscopies |
| Journal |
Solid State Phenomena (Volumes 80 - 81) |
| Volume |
Polycrystalline Semiconductors VI |
| Edited by |
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner |
| Pages |
77-82 |
| DOI |
10.4028/www.scientific.net/SSP.80-81.77 |
| Citation |
J. Herion et al., 2001, Solid State Phenomena, 80-81, 77 |
| Authors |
J. Herion, Ch. Ross |
| Keywords |
Growth, Hydrogenated Microcrystalline Silicon, Nucleation, Scanning Probe Microscopy |
| Full Paper |
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