Paper Title:
Poly-Crystallized SiGe Thin Films in a Low-Temperature Process
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 80-81)
Edited by
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner
Pages
83-88
DOI
10.4028/www.scientific.net/SSP.80-81.83
Citation
T. Noguchi, "Poly-Crystallized SiGe Thin Films in a Low-Temperature Process", Solid State Phenomena, Vols. 80-81, pp. 83-88, 2001
Online since
November 2001
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Price
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