Paper Title:
Effect of Pressure and Temperature on the Electrical Properties of LPCVD Silicon-Germanium Thin Films
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 80-81)
Edited by
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner
Pages
89-94
DOI
10.4028/www.scientific.net/SSP.80-81.89
Citation
D. Guillet, M. Sarret, H. Lhermite, O. Bonnaud, "Effect of Pressure and Temperature on the Electrical Properties of LPCVD Silicon-Germanium Thin Films", Solid State Phenomena, Vols. 80-81, pp. 89-94, 2001
Online since
November 2001
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Price
$32.00
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