Paper Title:
Intra-Grain Defects - Limiting Factor for Low-Temperature Polycrystalline Silicon Films?
  Abstract

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Periodical
Solid State Phenomena (Volumes 80-81)
Edited by
O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk and J.H. Werner
Pages
95-100
DOI
10.4028/www.scientific.net/SSP.80-81.95
Citation
T. A. Wagner, L. Oberbeck, R.B. Bergmann, J. Werner, "Intra-Grain Defects - Limiting Factor for Low-Temperature Polycrystalline Silicon Films?", Solid State Phenomena, Vols. 80-81, pp. 95-100, 2001
Online since
November 2001
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