Paper Title:
Silicon Wafer Requirements for ULSI Device Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
1-8
DOI
10.4028/www.scientific.net/SSP.82-84.1
Citation
F. Illuzzi, "Silicon Wafer Requirements for ULSI Device Processing", Solid State Phenomena, Vols. 82-84, pp. 1-8, 2002
Online since
November 2001
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Price
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