Silicon Wafer Requirements for ULSI Device Processing |
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| Journal | Solid State Phenomena (Volumes 82 - 84) |
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| Volume | Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by | V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages | 1-8 |
| DOI | 10.4028/www.scientific.net/SSP.82-84.1 |
| Authors | Francesca Illuzzi |
| Keywords | COPs, Cz Growth, Epitaxial Wafers, Silicon |
| Full Paper | 
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