Paper Title:
Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
127-132
DOI
10.4028/www.scientific.net/SSP.82-84.127
Citation
T. Müller, G. Obermeier, T. Bearda, A. Huber, R. Schmolke, W. von Ammon, W. Lerch, "Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing", Solid State Phenomena, Vols. 82-84, pp. 127-132, 2002
Online since
November 2001
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Price
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