Paper Title:
Nitrogen Effect on Hydrogen Penetration into Cz Si during Wet Chemical Etching
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
145-149
DOI
10.4028/www.scientific.net/SSP.82-84.145
Citation
A.L. Parakhonsky, E. B. Yakimov, D. R. Yang, "Nitrogen Effect on Hydrogen Penetration into Cz Si during Wet Chemical Etching", Solid State Phenomena, Vols. 82-84, pp. 145-149, 2002
Online since
November 2001
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Price
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