Paper Title:

Incorporation, Diffusion and Agglomeration of Carbon in Silicon

Periodical Solid State Phenomena (Volumes 82 - 84)
Main Theme Gettering anf Defect Engineering in Semiconductor Technology IX
Edited by V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages 189-194
DOI 10.4028/www.scientific.net/SSP.82-84.189
Citation P. Lavéant et al., 2001, Solid State Phenomena, 82-84, 189
Authors P. Lavéant, P. Werner, G. Gerth, U.M. Gösele
Keywords Agglomeration, Carbon, Cluster, Diffusion, MBE, Molecular Beam Epitaxy, Silicon Carbide (SiC)
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