Paper Title:
Incorporation, Diffusion and Agglomeration of Carbon in Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
189-194
DOI
10.4028/www.scientific.net/SSP.82-84.189
Citation
P. Lavéant, P. Werner, G. Gerth, U.M. Gösele, "Incorporation, Diffusion and Agglomeration of Carbon in Silicon", Solid State Phenomena, Vols. 82-84, pp. 189-194, 2002
Online since
November 2001
Export
Price
US$ 32,-
Share