Paper Title:
Thermal Evolution of Extrinsic Defects in Ion Implanted Silicon: Current Understanding and Modelling
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
201-206
DOI
10.4028/www.scientific.net/SSP.82-84.201
Citation
F. Cristiano, B. Colombeau, C. Bonafos, A. Altibelli, G. Benassayag, A. Claverie, "Thermal Evolution of Extrinsic Defects in Ion Implanted Silicon: Current Understanding and Modelling", Solid State Phenomena, Vols. 82-84, pp. 201-206, 2002
Online since
November 2001
Export
Price
$35.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.