Paper Title:
Stress-Induced Redistribution of Point Defects in Silicon Device Structures
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
225-230
DOI
10.4028/www.scientific.net/SSP.82-84.225
Citation
K.V. Loiko, I.V. Peidous, T.E. Harrington, W.R. Frensley, "Stress-Induced Redistribution of Point Defects in Silicon Device Structures", Solid State Phenomena, Vols. 82-84, pp. 225-230, 2002
Online since
November 2001
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Price
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