Paper Title:
Void Shrinkage during Thermal Oxidation of Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
273-278
DOI
10.4028/www.scientific.net/SSP.82-84.273
Citation
V. Raineri, S. Giuffrida, E. Rimini, "Void Shrinkage during Thermal Oxidation of Silicon", Solid State Phenomena, Vols. 82-84, pp. 273-278, 2002
Online since
November 2001
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Price
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