Paper Title:
Gettering Induced by Helium Implantation: Application to a Device
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
279-284
DOI
10.4028/www.scientific.net/SSP.82-84.279
Citation
F. Roqueta, D. Alquier, L. Ventura, B. López, "Gettering Induced by Helium Implantation: Application to a Device", Solid State Phenomena, Vols. 82-84, pp. 279-284, 2002
Online since
November 2001
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Price
$32.00
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