Paper Title:
Defects Created by Helium Implantation at Different Temperatures in Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
285-290
DOI
10.4028/www.scientific.net/SSP.82-84.285
Citation
M.-L. David, E. Oliviero, A. Ratchenkova, N. N. Gerasimenko, A. Declémy, J. F. Barbot, A. van Veen, M. F. Beaufort, "Defects Created by Helium Implantation at Different Temperatures in Silicon", Solid State Phenomena, Vols. 82-84, pp. 285-290, 2002
Online since
November 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.