Paper Title:
Damage Evolution in Helium-Hydrogen Co-Implanted (100) Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
291-296
DOI
10.4028/www.scientific.net/SSP.82-84.291
Citation
R. Tonini, F. Corni, C. Nobili, G. Ottaviani, F. Cazzaniga, G. Queirolo, "Damage Evolution in Helium-Hydrogen Co-Implanted (100) Silicon", Solid State Phenomena, Vols. 82-84, pp. 291-296, 2002
Online since
November 2001
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Price
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