Paper Title:
Gold Gettering by H+ or He++ Ion Implantation Induced Cavities and Defects in Cz Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
297-302
DOI
10.4028/www.scientific.net/SSP.82-84.297
Citation
I. Périchaud, E. B. Yakimov, S. Martinuzzi, C. Dubois, "Gold Gettering by H+ or He++ Ion Implantation Induced Cavities and Defects in Cz Silicon Wafers", Solid State Phenomena, Vols. 82-84, pp. 297-302, 2002
Online since
November 2001
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Price
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