Paper Title:
Dopant Segregation on Cavities Induced by Helium Implantation: The Case of Boron and Phosphorus
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
309-314
DOI
10.4028/www.scientific.net/SSP.82-84.309
Citation
F. Cayrel, D. Alquier, F. Roqueta, L. Ventura, C. Dubois, R. Jérisian, D. Mathiot, "Dopant Segregation on Cavities Induced by Helium Implantation: The Case of Boron and Phosphorus", Solid State Phenomena, Vols. 82-84, pp. 309-314, 2002
Online since
November 2001
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Price
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