Paper Title:
Hydrogen Redistribution and Void Formation in Hydrogen Plasma Treated Czochralski Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
315-322
DOI
10.4028/www.scientific.net/SSP.82-84.315
Citation
A. G. Ulyashin, R. Job, W. R. Fahrner, D. Grambole, F. Herrmann, "Hydrogen Redistribution and Void Formation in Hydrogen Plasma Treated Czochralski Silicon", Solid State Phenomena, Vols. 82-84, pp. 315-322, 2002
Online since
November 2001
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Price
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