Paper Title:
Precipitation Kinetics and Recombination Activity of Cu in Si in the Presence of Internal Gettering Sites
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
323-330
DOI
10.4028/www.scientific.net/SSP.82-84.323
Citation
A. A. Istratov, R. Sachdeva, C. Flink, S. Balasubramanian, E. R. Weber, "Precipitation Kinetics and Recombination Activity of Cu in Si in the Presence of Internal Gettering Sites", Solid State Phenomena, Vols. 82-84, pp. 323-330, 2002
Online since
November 2001
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Price
$32.00
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