Paper Title:
Iron Solubility in Boron-Doped Silicon and Fe Gettering Mechanism in p/p+ Epitaxial Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
331-340
DOI
10.4028/www.scientific.net/SSP.82-84.331
Citation
M. B. Shabani, Y. Shiina, S. Shimanuki, F.G. Kirscht, "Iron Solubility in Boron-Doped Silicon and Fe Gettering Mechanism in p/p+ Epitaxial Wafers", Solid State Phenomena, Vols. 82-84, pp. 331-340, 2002
Online since
November 2001
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Price
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