Paper Title:
Nickel Gettering in Silicon: Role of Oxygen
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
355-360
DOI
10.4028/www.scientific.net/SSP.82-84.355
Citation
G. Regula, R. El Bouayadi, B. Pichaud, E. Ntsoenzok, "Nickel Gettering in Silicon: Role of Oxygen", Solid State Phenomena, Vols. 82-84, pp. 355-360, 2002
Online since
November 2001
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Price
$32.00
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