Paper Title:
Comparison of Nickel and Iron Gettering in Cz Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
367-372
DOI
10.4028/www.scientific.net/SSP.82-84.367
Citation
F.G. Kirscht, B. Orschel, S. Rouvimov, M. Shabani, "Comparison of Nickel and Iron Gettering in Cz Silicon Wafers", Solid State Phenomena, Vols. 82-84, pp. 367-372, 2002
Online since
November 2001
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Price
$32.00
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