Paper Title:
Internal Gettering in Silicon: Experimental and Theoretical Studies Based on Fast and Slow Diffusing Metals
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
381-386
DOI
10.4028/www.scientific.net/SSP.82-84.381
Citation
P. Geranzani, M. Pagani, C. Pello, G. Borionetti, "Internal Gettering in Silicon: Experimental and Theoretical Studies Based on Fast and Slow Diffusing Metals", Solid State Phenomena, Vols. 82-84, pp. 381-386, 2002
Online since
November 2001
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Price
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