Paper Title:
The Realization of Uniform and Reliable Intrinsic Gettering in 200mm p- and p/p- Wafers for a Low Thermal Budget 0.18μm Advanced CMOS Logic Process
  Abstract

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Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
387-392
DOI
10.4028/www.scientific.net/SSP.82-84.387
Citation
M.J. Binns, A. Banerjee, R. Wise, D.J. Myers, T.A. McKenna, "The Realization of Uniform and Reliable Intrinsic Gettering in 200mm p- and p/p- Wafers for a Low Thermal Budget 0.18μm Advanced CMOS Logic Process", Solid State Phenomena, Vols. 82-84, pp. 387-392, 2002
Online since
November 2001
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