Paper Title:
Gettering Technology Based on Porous Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
405-410
DOI
10.4028/www.scientific.net/SSP.82-84.405
Citation
G. Lamedica, M. Balucani, A. Ferrari, V. Bondarenko, V. Yakovtseva, L. Dolgyi, "Gettering Technology Based on Porous Silicon", Solid State Phenomena, Vols. 82-84, pp. 405-410, 2002
Online since
November 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.