Paper Title:
Platinum Silicide Precipitate Formation During Phosphorus Diffusion Gettering in Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
411-416
DOI
10.4028/www.scientific.net/SSP.82-84.411
Citation
M. Seibt, A. Döller, V. V. Kveder, A. Sattler, A. Zozime, "Platinum Silicide Precipitate Formation During Phosphorus Diffusion Gettering in Silicon", Solid State Phenomena, Vols. 82-84, pp. 411-416, 2002
Online since
November 2001
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Price
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