Paper Title:
Existence of an Epitaxially Ordered Phase in the Buried Oxide of SIMOX Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
485-490
DOI
10.4028/www.scientific.net/SSP.82-84.485
Citation
T. Shimura, T. Hosoi, K. Fukuda, M. Umeno, "Existence of an Epitaxially Ordered Phase in the Buried Oxide of SIMOX Wafers", Solid State Phenomena, Vols. 82-84, pp. 485-490, 2002
Online since
November 2001
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