Paper Title:
Hydrogen-Related Phenomena in SOI Fabricated by Using H+-Ion Implantation
  Abstract

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Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
491-496
DOI
10.4028/www.scientific.net/SSP.82-84.491
Citation
I.V. Antonova, D.V. Nikolaev, O.V. Naumova, V.P. Popov, "Hydrogen-Related Phenomena in SOI Fabricated by Using H+-Ion Implantation", Solid State Phenomena, Vols. 82-84, pp. 491-496, 2002
Online since
November 2001
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Price
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