Paper Title:
Effects of Pulsed Electron Beam Annealing on Radiation Damage in N Doped a-SiC:H Films Deposited by PECVD
  Abstract

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Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
529-532
DOI
10.4028/www.scientific.net/SSP.82-84.529
Citation
J. Huran, I. Hotový, J. Staňo, A.P. Kobzev, N.I. Balalykin, "Effects of Pulsed Electron Beam Annealing on Radiation Damage in N Doped a-SiC:H Films Deposited by PECVD", Solid State Phenomena, Vols. 82-84, pp. 529-532, 2002
Online since
November 2001
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Price
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