Paper Title:
Cavities in He-Implanted SiC
| Periodical |
Solid State Phenomena (Volumes 82 - 84)
|
| Main Theme |
Gettering anf Defect Engineering in Semiconductor Technology IX
|
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
533-538 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.533 |
| Citation |
Jean François Barbot et al., 2001, Solid State Phenomena, 82-84, 533 |
| Authors |
Jean François Barbot, Erwan Oliviero, Marie-Laure David, Alain Declémy, C. Blanchard, Marie France Beaufort, A. van Veen |
| Keywords |
Bubble, He Implantation, Silicon Carbide (SiC) |
| Price |
US$ 28,- |