Paper Title:

Cavities in He-Implanted SiC

Periodical Solid State Phenomena (Volumes 82 - 84)
Main Theme Gettering anf Defect Engineering in Semiconductor Technology IX
Edited by V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages 533-538
DOI 10.4028/www.scientific.net/SSP.82-84.533
Citation Jean François Barbot et al., 2001, Solid State Phenomena, 82-84, 533
Authors Jean François Barbot, Erwan Oliviero, Marie-Laure David, Alain Declémy, C. Blanchard, Marie France Beaufort, A. van Veen
Keywords Bubble, He Implantation, Silicon Carbide (SiC)
Price US$ 28,-
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