Carbon-Oxygen-Related Complexes in Irradiated and Heat-Treated Silicon: IR Absorption Studies |
| Journal |
Solid State Phenomena (Volumes 82 - 84) |
| Volume |
Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
57-62 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.57 |
| Citation |
L.I. Murin et al., 2001, Solid State Phenomena, 82-84, 57 |
| Authors |
L.I. Murin, V.P. Markevich, J. Lennart Lindström, Mats Kleverman, J. Hermansson, T. Hallberg, Bengt G. Svensson |
| Keywords |
Carbon, Complex, Local Vibrational Modes, Oxygen, Silicon |
| Full Paper |
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