Paper Title:
Infrared Absorption Analysis of Nitrogen in Czochralski Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
63-68
DOI
10.4028/www.scientific.net/SSP.82-84.63
Citation
Y. Yamanaka, H. Harada, K. Tanahashi, T. Mikayama, N. Inoue, "Infrared Absorption Analysis of Nitrogen in Czochralski Silicon", Solid State Phenomena, Vols. 82-84, pp. 63-68, 2002
Online since
November 2001
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Price
$32.00
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