Infrared Absorption Analysis of Nitrogen in Czochralski Silicon |
| Journal |
Solid State Phenomena (Volumes 82 - 84) |
| Volume |
Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
63-68 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.63 |
| Citation |
Y. Yamanaka et al., 2001, Solid State Phenomena, 82-84, 63 |
| Authors |
Y. Yamanaka, Hiroshi Harada, K. Tanahashi, T. Mikayama, N. Inoue |
| Keywords |
Defect, Infrared Absorption, Nitrogen, Oxygen, Silicon |
| Full Paper |
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