Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers |
| Journal |
Solid State Phenomena (Volumes 82 - 84) |
| Volume |
Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
69-74 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.69 |
| Citation |
A. Karoui et al., 2001, Solid State Phenomena, 82-84, 69 |
| Authors |
A. Karoui, F.S. Karoui, De Ren Yang, George A. Rozgonyi |
| Keywords |
Cluster, Complex, Denuded Zones, Etching, FTIR, Interstitials, Lo-Hi, Nitrogen, Nomarski, Nucleation, OPP, Oxide, Oxygen, Oxynitride, Precipitation, Silicon, SIMS, Size Distribution, TEM, Vacancy, VN2, Void |
| Full Paper |
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