Paper Title:
Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
69-74
DOI
10.4028/www.scientific.net/SSP.82-84.69
Citation
A. Karoui, F.S. Karoui, D. R. Yang, G. A. Rozgonyi, "Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers", Solid State Phenomena, Vols. 82-84, pp. 69-74, 2002
Online since
November 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.