Paper Title:
Strain Characterisation at the nm Scale of Deep Sub-Micron Devices by Convergent-Beam Electron Diffraction
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
727-734
DOI
10.4028/www.scientific.net/SSP.82-84.727
Citation
A. Armigliato, R. Balboni, A. Benedetti, G.P. Carnevale, A.G. Cullis, S. Frabboni, D. Piccolo, "Strain Characterisation at the nm Scale of Deep Sub-Micron Devices by Convergent-Beam Electron Diffraction", Solid State Phenomena, Vols. 82-84, pp. 727-734, 2002
Online since
November 2001
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