Optical Properties of Oxygen Agglomerates in Silicon |
| Journal |
Solid State Phenomena (Volumes 82 - 84) |
| Volume |
Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
75-80 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.75 |
| Authors |
Simona Binetti,
Sergio Pizzini,
E. Leoni,
R. Somaschini,
Antonio Castaldini,
Anna Cavallini
|
| Keywords |
Dislocation, DLTS, Oxygen Precipitates, Photoluminescence, Silicon |
| Full Paper |
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