Optical Properties of Oxygen Agglomerates in Silicon |
| Journal |
Solid State Phenomena (Volumes 82 - 84) |
| Volume |
Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
75-80 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.75 |
| Citation |
Simona Binetti et al., 2001, Solid State Phenomena, 82-84, 75 |
| Authors |
Simona Binetti, Sergio Pizzini, E. Leoni, R. Somaschini, Antonio Castaldini, Anna Cavallini |
| Keywords |
Dislocations, DLTS, Oxygen Precipitates, Photoluminescence (PL), Silicon |
| Full Paper |
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