Paper Title:
SEM Vision Periodic Defect Review and Characterization after Inter-Metal Dielectric Deposition
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
759-764
DOI
10.4028/www.scientific.net/SSP.82-84.759
Citation
S. Ventola, J. Fort, F. La Spada, P. Maniscalco, "SEM Vision Periodic Defect Review and Characterization after Inter-Metal Dielectric Deposition", Solid State Phenomena, Vols. 82-84, pp. 759-764, 2002
Online since
November 2001
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Price
$32.00
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