Paper Title:
Ellipsometric Study of Ion-Implantation Damage in Single-Crystal Silicon - An Advanced Optical Model
  Abstract

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Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
765-770
DOI
10.4028/www.scientific.net/SSP.82-84.765
Citation
P. Petrik, O. Polgár, T. Lohner, M. Fried, N.Q. Khánh, J. Gyulai , "Ellipsometric Study of Ion-Implantation Damage in Single-Crystal Silicon - An Advanced Optical Model", Solid State Phenomena, Vols. 82-84, pp. 765-770, 2002
Online since
November 2001
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