Paper Title:

Characterization of Interfacial States at Silicon Bicrystals

Periodical Solid State Phenomena (Volumes 82 - 84)
Main Theme Gettering anf Defect Engineering in Semiconductor Technology IX
Edited by V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages 801-806
DOI 10.4028/www.scientific.net/SSP.82-84.801
Citation G.N. Kamaev et al., 2001, Solid State Phenomena, 82-84, 801
Authors G.N. Kamaev, S.V. Golod, E.M. Skok, A.K. Fedotov, A.V. Mazanik
Keywords Defect, Direct Bonding, Grain Boundary, Interface, Microwave Transient Photoconductivity, Polycrystal, Silicon, Silicon-on-Insulator (SOI)
Price US$ 28,-
Article Preview
View full size