Paper Title:
Characterization of Interfacial States at Silicon Bicrystals
| Periodical |
Solid State Phenomena (Volumes 82 - 84)
|
| Main Theme |
Gettering anf Defect Engineering in Semiconductor Technology IX
|
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
801-806 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.801 |
| Citation |
G.N. Kamaev et al., 2001, Solid State Phenomena, 82-84, 801 |
| Authors |
G.N. Kamaev, S.V. Golod, E.M. Skok, A.K. Fedotov, A.V. Mazanik |
| Keywords |
Defect, Direct Bonding, Grain Boundary, Interface, Microwave Transient Photoconductivity, Polycrystal, Silicon, Silicon-on-Insulator (SOI) |
| Price |
US$ 28,- |