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Silicon Isotope Shifts of the 648-cm-1 Infrared Absorption Line of Oxygen in Silicon

Journal Solid State Phenomena (Volumes 82 - 84)
Volume Gettering anf Defect Engineering in Semiconductor Technology IX
Edited by V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages 87-92
DOI 10.4028/www.scientific.net/SSP.82-84.87
Authors Hiroshi Yamada-Kaneta
Keywords Infrared Absorption, Isotope Shift, Local Vibrational Modes, Oxygen, Silicon
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