Silicon Isotope Shifts of the 648-cm-1 Infrared Absorption Line of Oxygen in Silicon |
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| Journal | Solid State Phenomena (Volumes 82 - 84) |
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| Volume | Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by | V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages | 87-92 |
| DOI | 10.4028/www.scientific.net/SSP.82-84.87 |
| Authors | Hiroshi Yamada-Kaneta |
| Keywords | Infrared Absorption, Isotope Shift, Local Vibrational Modes, Oxygen, Silicon |
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