Orthogonal Defect Solutions for Silicon Crystal Growth and Wafer Processing |
| Journal |
Solid State Phenomena (Volumes 82 - 84) |
| Volume |
Gettering anf Defect Engineering in Semiconductor Technology IX |
| Edited by |
V. Raineri, F. Priolo, M. Kittler and H. Richter |
| Pages |
9-16 |
| DOI |
10.4028/www.scientific.net/SSP.82-84.9 |
| Citation |
Robert J. Falster, 2001, Solid State Phenomena, 82-84, 9 |
| Authors |
Robert J. Falster |
| Keywords |
Defect Engineering, Microdefect, Oxygen Precipitation, Point Defect, Silicon |
| Full Paper |
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