Paper Title:
Orthogonal Defect Solutions for Silicon Crystal Growth and Wafer Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 82-84)
Edited by
V. Raineri, F. Priolo, M. Kittler and H. Richter
Pages
9-16
DOI
10.4028/www.scientific.net/SSP.82-84.9
Citation
R. J. Falster, "Orthogonal Defect Solutions for Silicon Crystal Growth and Wafer Processing", Solid State Phenomena, Vols. 82-84, pp. 9-16, 2002
Online since
November 2001
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Price
$32.00
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